Publication | Closed Access
Estimation of Temperature Rise in Electron Beam Heating of Thin Films
33
Citations
1
References
1967
Year
EngineeringTemperature RiseThermal AnalysisThermodynamicsThermal ModelingThermal ConductionThin Film ProcessingElectrical EngineeringPhysicsThermal TransportHeat TransferMicroelectronicsElectron BeamApplied PhysicsTemperature MeasurementTransient Temperature DistributionThin FilmsElectron Beam HeatingThermal SensorThermal EngineeringElectrical Insulation
Expressions are given for estimating the transient temperature distribution in a thin film heated by an electron beam. Graphical presentations in terms of dimensionless (reduced) variables are included to aid in specific calculations for designing an electron beam for use as a heating tool.
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