CIRP Annals · 1991 · 35 citations · 1 references
EngineeringMechatronics EngineeringSystems EngineeringInstrumentationMetrologyOpticsCoordinate MeasurementCoordinate MetrologyCoordinate SystemsDisplacement MeasurementInterferometryTracking SystemsInterferometric MeasurementLaser InterferometryLaser Metrology SystemsOptical Coordinate MeasurementThree-dimensional Coordinate Measurement
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