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Application of Auger electron spectroscopy and principal component analysis to the study of the Pd/c-Si and Pd/a-Si interfaces

Auger Electron SpectroscopyPd/a-si InterfacesEngineeringPhysicsNanoelectronicsSurface AnalysisSurface ScienceApplied PhysicsSiliceneSemiconductor Device FabricationPrincipal Component AnalysisSilicon On InsulatorMicroelectronicsInterface Structure