Publication | Closed Access
Divacancy control of the balance between ion-beam-induced epitaxial cyrstallization and amorphization in silicon
149
Citations
12
References
1988
Year
Materials ScienceDivacancy ControlIon ImplantationIon-beam-induced Epitaxial CyrstallizationEngineeringApplied PhysicsSemiconductor Device FabricationMolecular Beam EpitaxySilicon On InsulatorEpitaxial Growth
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