Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques · 2015 · 27 citations · 7 references
Natural SciencesMaterials EngineeringMaterials ScienceNanotechnologySurface ChemistrySurface ScienceNanostructured SurfacesSilicon MaterialsSurface Chemistry Of SolidsSurface CrystallographySurface KineticsSurface PhysicsNanostructure CharacterizationSilicon Surface ScienceSurface Reaction Mechanisms
The effect of Ar + -ion bombardment on the surface composition and structure of CoSi 2 /Si nano-films is studied. It is demonstrated that ion bombardment leads to the decomposition of CoSi 2 and enrichment of the film surface with Si atoms. After heating at T = 850–900 K, the Si-CoSi 2 -Si nanofilm system forms.
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Sputtering of compound semiconductor surfaces. I. Ion-solid interactions and sputtering yields
J.B. Malherbe · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 1994 · 92 citations
Natural Sciences, Materials Science, Electronic Materials +15
CoSi 2 -coated Si nanocrystal memory
Bei Li, Jianlin Liu · Journal of Applied Physics · 2009 · 24 citations
N.Yu. Sdobnyakov, S. V. Repchak, V. M. Samsonov et al. · Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques · 2011 · 21 citations
Natural Sciences, Materials Engineering, Materials Science +16