Very high tunable inter-digital capacitor using bismuth zinc niobate thin-film dielectrics for microwave applications

Abstract

A very high tunable inter-digital capacitor (IDC) using the bismuth zinc niobate (BZN) pyrochlore thin-film dielectrics is presented for microwave applications. To increase the tunability of the IDC and reduce DC bias voltage, its electrodes are fully embedded into the tunable BZN dielectrics. At 20 V DC applied, the IDC yields 72 and 75% tunability at 2.4 and 5.8 GHz, respectively.