Vacuum ultraviolet photoelectron spectroscopy of (NH4)2S-treated GaAs (100) surfaces

C. J. Spindt, D. Liu, K. E. Miyano, Paul Meissner, T. T. Chiang, T. Kendelewicz, I. Lindau, W. E. Spicer

Applied Physics Letters · 1989 · 122 citations · 14 references

Concepts

Abstract

The surface chemistry and band bending of the ammonium sulfide-treated GaAs (100) surface has been studied using surface-sensitive synchrotron radiation photoemission spectroscopy. We find that the treatment leaves the GaAs surface terminated with roughly a monolayer of sulfur bonded to both As and Ga atoms. An n-type barrier height of 0.8 eV is measured. The thermal stability of the various chemical components is studied and various issues of the passivating mechanism are discussed.

References

14