Publication | Closed Access
Microstructure and mechanical properties of reactively sputtered Ti–Si–N nanocomposite films
25
Citations
9
References
2005
Year
Materials ScienceEngineeringNanomaterialsMechanical EngineeringApplied PhysicsThin Film Process TechnologyThin FilmsTi–si–n Nanocomposite FilmsThin Film ProcessingMaterial Preparation
| Year | Citations | |
|---|---|---|
Page 1
Page 1