Effect of Ar gas pressure on growth, structure, and mechanical properties of sputtered Ti, Al, TiAl, and Ti3Al films - Concepedia

Concepedia

Publication | Closed Access

Effect of Ar gas pressure on growth, structure, and mechanical properties of sputtered Ti, Al, TiAl, and Ti3Al films

117

Citations

15

References

1995

Year

M. Chinmulgund, R. B. Inturi, J. A. Barnard

Thin Solid Films

Materials ScienceMaterials EngineeringEngineeringSputtered TiAr Gas PressureMechanical EngineeringApplied PhysicsHigh-performance MaterialTi3al FilmsThin FilmsChemical DepositionChemical Vapor DepositionThin Film ProcessingMicrostructure

References

	Year	Citations

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