Concepedia

Differential 3ω method for measuring thermal conductivity of AlN and Si3N4 thin films

Manuel Bogner, Alexander Hofer, Günther Benstetter, Hermann J. Gruber, Yongqing Fu

Thin Solid Films · 2015 · 33 citations · 18 references

DOI

Concepts

References

18

Thermal conductivity measurement from 30 to 750 K: the 3ω method

David G. Cahill · Review of Scientific Instruments · 1990 · 1.9K citations

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The intrinsic thermal conductivity of AIN

Glen A. Slack, R. A. Tanzilli, R. O. Pohl et al. · Journal of Physics and Chemistry of Solids · 1987 · 989 citations

, , +12

Heat transport in thin dielectric films

Seung Min Lee, David G. Cahill · Journal of Applied Physics · 1997 · 716 citations

, , +17

Thermometry and Thermal Transport in Micro/Nanoscale Solid-State Devices and Structures

David G. Cahill, Kenneth E. Goodson, Arun Majumdar · Journal of Heat Transfer · 2001 · 602 citations

, , +17

Thermal conductivity of<i>a</i>-Si:H thin films

David G. Cahill, Monica Katiyar, John R. Abelson · Physical review. B, Condensed matter · 1994 · 516 citations

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