Thermal conductivity of sputtered and evaporated SiO2 and TiO2 optical coatings

Abstract

The thermal conductivity of SiO2 and TiO2 optical coatings are measured in the temperature range 80–400 K. For SiO2, the thermal conductivity of sputtered and evaporated films are 77% and 55% of the bulk value, respectively, independent of temperature. Similarly, the thermal conductivity of evaporated TiO2 is 63% of the conductivity of sputtered TiO2.