Journal of Applied Physics · 2010 · 19 citations · 12 references
Materials EngineeringMaterials ScienceElectrical EngineeringDiamond-like CarbonEngineeringResistorContact Placement ErrorElectrodes PlacementFinite Element AnalysisSpecific ResistanceSurface ScienceHigh PressureAccurate Resistivity MeasurementMicroelectronicsContact PlacementElectrical PropertyElectrochemistryElectrical Insulation
The van der Pauw technique is widely used to determine resistivity of materials. In diamond anvil cell the compressed sample will make the contact placement change under high pressure. Using finite element analysis, we study the effect of contact placement error induced by pressure on the resistivity measurement accuracy of van der Pauw method. The results show the contact placement has a significant effect on determination accuracy. This method can provide accurate determination of sample resistivity when the spacing b between the contact center and sample periphery is less than D/9 (sample diameter). And the effect of contact placement error on accuracy rapidly increases as the contact location is closing to the sample center. For the same contact placement, the contact size error has a more obvious effect on the semiconductor sample.
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