Journal of Applied Physics · 1965 · 62 citations · 1 references
Materials ScienceTungsten SurfacesEngineeringCrystalline DefectsPhysicsSurface ScienceApplied PhysicsAcute IncidenceIncident Ion EnergiesAtomic PhysicsIon Beam InstrumentationIon BeamClutteringVisibilityIon EmissionArgon Ions
Experimental sputtering yields obtained for incidence angles from 2° to 90° (normal) with incident ion energies of 1.5 to 30 keV are reported. These data were obtained by bombardment of copper, molybdenum, and tungsten surfaces with xenon and argon ions. Brief surveys of low- and high-temperature surface effects are also reported.
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Collection and sputtering experiments with noble gas ions
O. Almén, G. Bruce · Nuclear Instruments and Methods · 1961 · 416 citations