High rate deposition of hard a-C:H films using microwave excited plasma enhanced CVD - Concepedia

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High rate deposition of hard a-C:H films using microwave excited plasma enhanced CVD

14

Citations

26

References

2011

Year

Margarita Günther, I. Bialuch, S. Peter, K. Bewilogua, Frank Richter

Surface and Coatings Technology

High Rate DepositionElectrical EngineeringEngineeringApplied PhysicsH FilmsHard A-cGas Discharge PlasmaMicroelectronicsPlasma ProcessingPlasma Application

References

	Year	Citations

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