Thermal decomposition of copper nitride thin films and dots formation by electron beam writing - Concepedia

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Thermal decomposition of copper nitride thin films and dots formation by electron beam writing

114

Citations

7

References

2001

Year

Toshikazu Nosaka, Masaaki Yoshitake, Akio Okamoto, Soichi OGAWA, Yoshikazu Nakayama

Applied Surface Science

Materials ScienceEngineeringElectron Beam WritingNanotechnologySurface ScienceApplied PhysicsThermal DecompositionThin FilmsChemical DepositionChemical Vapor DepositionThin Film ProcessingDots Formation

References

	Year	Citations

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