Publication | Closed Access
Effect of Secondary Annealing on the Electrical Properties of Polysilicon Thin Films
11
Citations
11
References
2015
Year
Materials ScienceMaterials EngineeringElectrical EngineeringPolysilicon Thin FilmsEngineeringNanoelectronicsApplied PhysicsSecondary AnnealingSemiconductor MaterialSemiconductor Device FabricationThin FilmsSilicon On InsulatorMicroelectronicsElectrical PropertiesThin Film ProcessingElectrical Insulation
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