Modelling and Simulation of SAW Sensor Using FEM

Abstract

The paper deals with modelling and simulation of surface acoustic waves sensor using finite element method. SAW sensor is made from piezoelectric GaN layer and SiC substrate. In the modelling, FEM code ANSYS is used, where modal and transient piezoelectric analysis are performed. Only plane behavior of the SAW device with transversally isotropic material properties are considered. Modal analysis is used to determined eigenmode and eigenfrequency of the system and the frequency is used as input in transient analysis as frequency of excitation. In transient analysis with harmonic loading wave propagation on the surface of piezoelectric layer as well as wave propagation into the substrate is investigated.