Gas Flow Pattern and Mass Transfer Analysis in a Horizontal Flow Reactor for Chemical Vapor Deposition

Abstract

To study mass transfer characteristics in a vapor deposition reactor, gas flow patterns in a horizontal tube were investigated. Combined free and forced convection spiral flow and pure forced convection laminar flow were observed depending on experimental conditions of various flow rates and pressures. Further, local deposition rates under two flow behaviors were numerically obtained by solving a three‐dimensional mass conservation equation. It was estimated on the basis of calculated results that forced convection laminar flow in a rectangular reactor produced better uniformity on the deposition rate distribution across the width than did combined convection spiral flow.