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Microscopic study of cluster formation in the Ga on GaAs(001) system
45
Citations
14
References
1993
Year
Materials ScienceCluster ScienceIi-vi SemiconductorEngineeringPhysicsSurface ScienceApplied PhysicsCondensed Matter PhysicsCluster FormationMicroscopic StudySemiconductor MaterialSystem GaGaas SurfaceMolecular Beam EpitaxyMicrostructureCluster Morphology
A microscopic study of the cluster morphology for the system Ga on GaAs(001) is presented. Clusters are shown to have significant volume fractions below the surface level of the surrounding substrate. A thermodynamic model qualitatively describes this phenomena based on a comparison between (a) arsenic desorption from the GaAs surface, limited either by bulk diffusion of arsenic or surface diffusion of gallium to the nearest cluster and (b) dissolution of GaAs in Ga clusters with subsequent diffusion of the As to the cluster surface and desorption. A quantitative rate prediction based on this model is in an order of magnitude agreement with the experimental data.
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