Thin Solid Films · 2007 · 28 citations · 7 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySemiconductor MaterialsThin FilmsChemical Vapor DepositionDopingSemiconductor Thin FilmsSilicon MaterialsThin-film DepositionThin-film MaterialsBoron ChemistryChemical Vapor Deposition MaterialsDoping ControlDoping In Thin FilmsSilicon Chemical Vapor DepositionSilicon DopingSilicon Thin FilmsThin-film Semiconductors
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Electronic transport in nanometre-scale silicon-on-insulator membranes
Pengpeng Zhang, Emma Tevaarwerk, Byoung-Nam Park et al. · Nature · 2006 · 180 citations
E. Vallat‐Sauvain, U. Kroll, J. Meier et al. · Journal of Applied Physics · 2000 · 148 citations · Full text
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Stefan Klein, F. Finger, Reinhard Carius et al. · Journal of Applied Physics · 2005 · 104 citations · Full text
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