Applied Physics A · 2004 · 10 citations · 1 references
EngineeringMechanical EngineeringMechatronics EngineeringActuatorsMechatronic DesignMechatronicsMems ActuatorsMems DesignPneumatic ActuationPneumatic ActuatorsPneumatic SystemsDiaphragm ActuatorsDiaphragm MechanicsVacuum Pressure SettingsVacuum SystemsVacuum Technology
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Pumping speed of diaphragm pumps for various gases
F.J. Eckle, P Bickert, R. Lachenmann et al. · Vacuum · 1996 · 14 citations