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High Temperature Stable Acoustic Surface Wave Substrates of SiO<sub>2</sub>/LiNbO<sub>3</sub>Structure with Super High Coupling
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2002
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Materials ScienceZero TcfEngineeringPhysicsPhysical AcousticAcoustic MetamaterialSurface ScienceApplied PhysicsCondensed Matter PhysicsMultilayer HeterostructuresSio2 Film ThicknessSuper High CouplingAcoustic Wave DevicesThin Film Thickness
In this study, in order to improve the temperature coefficient of frequency (TCF), the propagation characteristics of SiO2/Rotated Y-cut, X-propagating LiNbO3 leaky surface acoustic wave (SAW) substrates with a large electromechanical coupling coefficient (k2), zero attenuation and zero TCF are theoretically investigated. The results showed a large k2 of more than 0.2 (zero k2 of Rayleigh mode), zero TCF and zero propagation attenuation for leaky SAW in the case of a short boundary at a thin film thickness of H/λ\fallingdotseq0.15–0.25 (H: SiO2 film thickness, λ: SAW wavelength). The experimental results agreed with the theoretical ones.