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Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6

Materials SciencePhotonicsOptical MaterialsEngineeringOptical PropertiesUltrafast LaserApplied PhysicsLaser ApplicationsSilicon ConesOrdered ArraysSilicon On InsulatorMicro-optical ComponentPlasma EtchingOptoelectronicsNanolithography MethodDiffractive Optic