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Chemical vapor deposition of Al2O3 films using highly volatile single sources

Materials ScienceMaterials EngineeringChemical EngineeringAluminium NitrideEngineeringVolatile Single SourcesSurface ScienceApplied PhysicsAl2o3 FilmsThin Film Process TechnologyThin FilmsChemical DepositionChemical Vapor DepositionChemical VaporThin Film Processing