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Normal incidence reflectance of ion beam deposited SiC films in the EUV

DOI

41

Citations

5

References

1988

Year

Ritva Keski-Kuha, John F. Osantowski, H. Herzig, Jeffrey S. Gum, Albert R. Toft
Applied Optics

Abstract

Get PDF Email Share Share with Facebook Tweet This Post on reddit Share with LinkedIn Add to CiteULike Add to Mendeley Add to BibSonomy Get Citation Copy Citation Text Ritva A. M. Keski-Kuha, John F. Osantowski, Howard Herzig, Jeffrey S. Gum, and Albert R. Toft, "Normal incidence reflectance of ion beam deposited SiC films in the EUV," Appl. Opt. 27, 2815-2816 (1988) Export Citation BibTex Endnote (RIS) HTML Plain Text Citation alert Save article

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