R.F. reactive sputter deposition of hydrogenated amorphous silicon carbide films - Concepedia

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R.F. reactive sputter deposition of hydrogenated amorphous silicon carbide films

23

Citations

12

References

1986

Year

B. Goranchev, K. Reichelt, J. Chevallier, P. Hornshøj, H. Dimigen, H. Hübsch

Thin Solid Films

Materials EngineeringMaterials ScienceEngineeringSurface ScienceApplied PhysicsThin FilmsReactive Sputter DepositionAmorphous SolidChemical Vapor DepositionThin Film ProcessingCarbide

References

	Year	Citations

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