Concepedia

Publication | Closed Access

Monte Carlo simulation of the transport of atoms in DC magnetron sputtering

DOI

78

Citations

31

References

2005

Year

Stijn Mahieu, Guy Buyle, Diederik Depla, S. Heirwegh, Pieter Ghekiere, Roger De Gryse
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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