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Growth and characterization of yttrium oxide thin layers on silicon deposited by yttrium evaporation in atomic oxygen

Materials ScienceThin LayersEpitaxial GrowthAtomic OxygenYttrium EvaporationEngineeringOxide ElectronicsApplied PhysicsThin FilmsSilicon On InsulatorMolecular Beam EpitaxyThin Film Processing