Publication | Closed Access
Ion bombardment during thin film deposition and its influence on mechanical and chemical surface properties
58
Citations
19
References
1991
Year
Materials ScienceChemical Surface PropertiesIon ImplantationEngineeringSurface ScienceApplied PhysicsIon BombardmentChemical Vapor DepositionThin FilmsChemical DepositionThin Film DepositionThin Film ProcessingMicrostructure
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