Low-loss suspended quantum well waveguides

Abstract

We have used surface micromachining to fabricate suspended InGaAs/InGaAsP quantum well waveguides that are supported by lateral tethers. The average measured TE propagation loss in our samples is 4.1 dB/cm, and the average measured TE loss per tether pair is 0.21 dB. These measurements are performed at wavelengths in the optical L-band, just 125 nm below the quantum well band gap.