Publication | Closed Access
Friction-induced hillocks on monocrystalline silicon in atmosphere and in vacuum
42
Citations
29
References
2010
Year
Materials EngineeringEngineeringPhysicsMechanical EngineeringApplied PhysicsSurface ScienceCondensed Matter PhysicsSemiconductor Device FabricationSilicon On InsulatorNanotribologyMonocrystalline SiliconSilicon Debugging
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