Characterization of Zn1−xMgxO transparent conducting thin films fabricated by multi-cathode RF-magnetron sputtering - Concepedia

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Characterization of Zn1−xMgxO transparent conducting thin films fabricated by multi-cathode RF-magnetron sputtering

34

Citations

13

References

2009

Year

K. Maejima, Hajime Shibata, Hitoshi Tampo, Koji Matsubara, Shigeru Niki

Thin Solid Films

Materials ScienceMaterials EngineeringMaterial AnalysisEngineeringOxide ElectronicsApplied PhysicsZn1−xmgxo TransparentSemiconductor MaterialThin Film Process TechnologyThin FilmsMulti-cathode Rf-magnetron SputteringThin Film Processing

References

	Year	Citations

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