Japanese Journal of Applied Physics · 1981 · 18 citations · 7 references
Natural SciencesMaterials EngineeringMaterials SciencePolymer ChemistryPolymer MaterialsThin FilmsDielectric MaterialsDielectric PropertiesDielectricsPolymer CharacterizationPolymer StabilizationPolymer Thin FilmsLoss TangentPlasma Dielectric ResponsePlasma PolymerizationPlasma TreatmentPlasma Treatment Of PolymersPlasma-induced DegradationPolymer DielectricsPolymer Film Performance
Capacitance and dielectric loss tangent of plasma polymerized styrene films are obtained as a function of temperature. The stability of these films is investigated with heating in a vacuum and in air. It was found that the hydrogen plasma treatment is effective in improving and stabilizing the dielectric properties of the plasma polymerized styrene films.
7