Influence of composition and structure on the mechanical properties of BCN coatings deposited by thermal CVD

S. Stöckel, K. Weise, D. Dietrich, Thomas Thamm, Marek Braun, R. Cremer, D. Neuschütz, G. Marx

Thin Solid Films · 2002 · 23 citations · 10 references

Concepts

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