Deposition of silicon nitride thin films by RF magnetron sputtering: a material and growth process study - Concepedia

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Deposition of silicon nitride thin films by RF magnetron sputtering: a material and growth process study

71

Citations

43

References

2011

Year

M.A. Signore, Anna Sytchkova, D. Dimaio, A. Cappello, A. Rizzo

Optical Materials

Materials ScienceMaterials EngineeringEngineeringSurface ScienceApplied PhysicsGrowth Process StudySemiconductor Device FabricationRf Magnetron SputteringThin FilmsChemical DepositionMicroelectronicsChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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