Concepedia

Deposition of silicon nitride thin films by RF magnetron sputtering: a material and growth process study

M.A. Signore, Anna Sytchkova, D. Dimaio, A. Cappello, A. Rizzo

Optical Materials · 2011 · 71 citations · 43 references

DOI

Concepts

References

43

The Long-Wavelength Edge of Photographic Sensitivity and of the Electronic Absorption of Solids

F. Urbach · Physical Review · 1953 · 5.8K citations

, , +13

A Monte Carlo computer program for the transport of energetic ions in amorphous targets

J.P. Biersack, L.G. Haggmark · Nuclear Instruments and Methods · 1980 · 4.7K citations

, , +11

Physics of Thin Films

G. Hass, D. Gerstenberg · Journal of The Electrochemical Society · 1964 · 1.8K citations

, , +8

The hydrogen content of plasma-deposited silicon nitride

W. A. Lanford, Myron J. Rand · Journal of Applied Physics · 1978 · 780 citations

, , +10

Control of reactive sputtering processes

W.D. Sproul, D.J. Christie, D.C. Carter · Thin Solid Films · 2005 · 392 citations

, , +8