Pyramid‐Shaped Si/Ge Superlattice Quantum Dots with Enhanced Photoluminescence Properties

Abstract

Pyramid-shaped Si/Ge superlattice quantum dots (QDs, see Figure) have been fabricated using self-assembled Ge QDs as a “virtual nanomask” for selective wet etching of the Si/Ge superlattice. The nanodots exhibit an approximately tenfold increase in photoluminescence over conventional Si/Ge superlattice heterostructures.