Publication | Closed Access
Defect passivation in chemical vapour deposited fine-grained polycrystalline silicon by plasma hydrogenation
33
Citations
6
References
2005
Year
Materials ScienceIon ImplantationEngineeringApplied PhysicsPlasma HydrogenationSemiconductor Device FabricationChemical VapourDefect PassivationPlasma ProcessingSilicon On InsulatorSilicon Debugging
| Year | Citations | |
|---|---|---|
1975 | 2.8K | |
1983 | 453 | |
2005 | 64 | |
2004 | 39 | |
2002 | 30 | |
1998 | 12 |
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