Thin Solid Films · 2005 · 33 citations · 6 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsChemical Vapor DepositionDefects In Electronic MaterialsSemiconductor DefectsSemiconductor Device MaterialsSilicon MaterialsSurface PassivationDefect PassivationHydrogenationPassivationPolycrystalline SiliconSiliconSilicon Chemical Vapor DepositionSilicon DefectsSilicon Passivation
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Neutralization of Shallow Acceptor Levels in Silicon by Atomic Hydrogen
J. I. Pánkové, David Carlson, J. E. Berkeyheiser et al. · Physical Review Letters · 1983 · 455 citations