Monte Carlo Simulation of Yield and Energy Distribution of Secondary Electrons Emitted from Metal Surfaces

Abstract

A Monte Carlo simulation of secondary electron emission from Be (atomic number Z =4), Mg ( Z =12), Al ( Z =13), Mo ( Z =42) and W ( Z =74) due to 100 eV–4 keV electron impacts is performed in order to understand the primary energy ( E p ) dependence of the yield and the energy distribution of secondary electrons. The E p -dependence of the secondary electron yield calculated for the metals is characterized in terms of the maximum yield and E p at which it occurs, which are in good ageement with Kollath's empirical formula for E p where the formula can be applied. At high E p (>1 keV), the calculated energy distribution of the secondary electrons, except for Mg which has a low surface potential barrier, approaches the E p -independent theoretical curve derived by Chung and Everhart. At low E p , however, the energy distribution largely depends on E p , in particular for high- Z metal.