Influence of iron–silicon interaction on the growth of carbon nanotubes produced by chemical vapor deposition

Abstract

Carbon nanotubes are often grown by chemical vapor deposition on silicon substrates covered with an iron catalyst. Photoemission and scanning electron microscopy studies presented here reveal how the iron silicide interface phase formed at elevated temperatures influences the catalytic efficiency of the iron. Moreover, we will show how the deposition of a thin layer of dense titanium nitride between the silicon substrate and the iron catalyst effectively prevents the formation of the silicide phase and consequently improves the carbon nanotubes growth.