Publication | Closed Access
A new fabrication method for vanadium dioxide thin films deposited by ion beam sputtering
42
Citations
8
References
2003
Year
Materials ScienceMaterials EngineeringNew Fabrication MethodEngineeringNanotechnologySurface ScienceApplied PhysicsIon Beam SputteringThin Film Process TechnologyVacuum DeviceThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing
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