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Structural, optical and electrical properties of AZO/Cu/AZO tri-layer films prepared by radio frequency magnetron sputtering and ion-beam sputtering

Materials EngineeringMaterials ScienceElectrical EngineeringOptical MaterialsEngineeringIon-beam SputteringOxide ElectronicsApplied PhysicsThin FilmsElectrical PropertiesOptoelectronicsChemical Vapor DepositionDepth-graded Multilayer CoatingThin Film ProcessingAzo/cu/azo Tri-layer Films