Secondary electron emission due to primary and backscattered electrons

Abstract

Based on a simple atomic model giving the potential between electrons and atoms as V(r)=Ze2as −1/srs, the range of electrons penetrating solid targets is derived. Starting from the generalized power law involving the energy loss, the Lenard-type absorption law, and the assumption that the distribution of the secondary electrons due to both incident and backscattered electrons within the target is isotropic, a theoretical universal reduced yield curve of secondary electrons and the resulting maximum yield, which are found to be in good accordance with results obtained experimentally, are deduced as a function of three parameters such as atomic number, resonance potential and backscattering coefficient.