Study of the growth of thin nitride films under low-energy nitrogen-ion bombardment - Concepedia

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Study of the growth of thin nitride films under low-energy nitrogen-ion bombardment

10

Citations

10

References

1994

Year

Zhong‐Min Ren, Zhifeng Ying, Xia-Xing Xiong, Mao-Qi He, Fuming Li, Yuan‐Cheng Du, Liang-Yao Cheng

Applied Physics A

Materials ScienceLow-energy Nitrogen-ion BombardmentEngineeringSurface ScienceApplied PhysicsThin FilmsChemical Vapor DepositionThin Film ProcessingMicrostructureThin Nitride Films

References

	Year	Citations

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