Materials Science and Engineering A · 2006 · 25 citations · 11 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSurface ScienceThin FilmsImplant MaterialsIon ImplantationPlasma Surface TreatmentSemiconductor Device MaterialsImplantation Through Thin FilmsIon Beam Surface TreatmentIon Implantation EffectsIon Source PhysicsSurface Modification By Ion ImplantationSurface Properties
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