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Electrical, optical and mechanical properties of sputtered CrNy and Cr1−xSixN1.02 thin films

Materials ScienceSputtered CrnyOptical MaterialsEngineeringMaterial AnalysisMechanical PropertiesOptical PropertiesSurface ScienceApplied PhysicsCr1−xsixn1.02 Thin FilmsThin Film Process TechnologyThin FilmsEpitaxial GrowthThin Film Processing