Detection of Hydrogen in Metals by the SIMS-Method with Quadrupole Mass Filter

Abstract

The detectability of the hydrogen content in metals has been studied with the use of the SIMS-method and a quadrupole mass filter. It has been established that the detection of hydrogen can be accomplished by decreasing the high starting level of the secondary ion mass spectrum. The authors designed a new type of secondary ion optics, the most important part of which is the energy analyzer filtering out the hydrogen ions with high velocity and the biggest part of the neutral particles. After a description of the constructional modifications we present hydrogen peaks obtained on the surface and at given depths of various metal samples which can be evaluated.