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Electrical characteristics of amorphous In–Ga–Zn–O thin-film transistors prepared by radio frequency magnetron sputtering with varying oxygen flows

Materials ScienceElectrical CharacteristicsElectrical EngineeringElectronic DevicesEngineeringElectronic MaterialsOxide ElectronicsApplied PhysicsSemiconductor MaterialRadio Frequency MagnetronThin Film Process TechnologyThin FilmsAmorphous SolidThin Film ProcessingOxygen Flows