Journal of Applied Physics · 2005 · 72 citations · 14 references
EngineeringParticle RemovalDetonation PhenomenonMicrofabricationLaser-induced BreakdownShock-wave DynamicsMechanical EngineeringApplied PhysicsSurface ScienceSilicon SurfaceLaser AblationLaser Processing TechnologyParticle TechnologyLaser-assisted DepositionMultiphase FlowShock CompressionLaser Shock Cleaning
It has been shown that the laser shock cleaning (LSC) method is effective for eliminating micron- and submicron-scale particulates from solid surfaces. In the LSC process, a high-power laser pulse induces optical breakdown of the ambient gas close to the solid surface to be cleaned and the subsequently-created shock wave followed by a high-speed flow stream detaches the particles. Therefore, there should be a strong correlation between the dynamics of the shock wave and the cleaning performance. In this work, experimental analyses are conducted to measure the cleaning performance using micron-sized alumina particles attached to a silicon surface. The experimental data showing the particle-removal performance are compared with the results of the dynamics of the laser-induced shock waves, leading to a simple model for particle removal by the LSC scheme in the continuum-flow regime.
14
Similarity and Dimensional Methods in Mechanics
L. I. Sedov, Morris D. Friedman, Maurice Holt et al. · Journal of Applied Mechanics · 1961 · 921 citations · Full text
Laser-cleaning techniques for removal of surface particulates
A. C. Tam, W. P. Leung, Werner Zapka et al. · Journal of Applied Physics · 1992 · 412 citations
Adhesion and Removal of Fine Particles on Surfaces
Madhav B. Ranade · Aerosol Science and Technology · 1987 · 218 citations · Full text