Low-resistance and highly-reflective Zn–Ni solid solution/Ag ohmic contacts for flip-chip light-emitting diodes

Abstract

We have investigated a Zn–Ni solid solution/Ag scheme for use in producing high-quality ohmic contacts for flip-chip light-emitting diodes (LEDs). The as-deposited contact shows nonlinear I–V characteristics. However, oxidizing the contacts at temperatures of 350–550 °C for 1 min in air ambient results in linear I–V behaviors, yielding specific contact resistances of 10−4–10−5 Ω cm2. In addition, LEDs are fabricated with the oxidized Zn–Ni solid solution/Ag contacts and Ag single contacts. The typical I–V characteristics of the LEDs with the annealed Zn–Ni solid solution (2.5 nm)/Ag (200 nm) p-type contact layers reveal a forward-bias voltage of 3.25 V at an injection current of 20 mA, which is much better than that of the LEDs with the Ag (200 nm) contact layers.