Concepedia
Plasma Chemistry and Plasma Processing · 1988 · 70 citations · 16 references
EngineeringMaterials EngineeringMaterials ScienceCombustionPhysical ChemistryCombustion FundamentalsIgnitionBy-product FormationBy-product Formation ControlIgnition Of Solid FuelsIgnition PhysicsKinetic Analysis Of DecompositionSpark IgnitionVolatile Oxide Formation
16
Neutral Decomposition Products in Spark Breakdown of SF6
I. Sauers, H. W. Ellis, L. G. Christophorou · IEEE Transactions on Electrical Insulation · 1986 · 139 citations
Natural Sciences, Chemistry, Materials Science +7
Dry Etching of Polyimide in O 2 ‐ CF 4 and O 2 ‐ SF 6 Plasmas
G. Turban, Michel Rapeaux · Journal of The Electrochemical Society · 1983 · 117 citations
Natural Sciences, Materials Engineering, Materials Science +17
Production rates for oxyfluorides SOF2, SO2F2, and SOF4 in SF6 corona discharges
R.J. Vanbrunt · Journal of Research of the National Bureau of Standards · 1985 · 117 citations · Full text
Natural Sciences, Chemistry, Physics +11
Plasma diagnostics of a SF<sub>6</sub>radiofrequency discharge used for the etching of silicon
A. Picard, G. Turban, B. Grolleau · Journal of Physics D Applied Physics · 1986 · 106 citations
Natural Sciences, Materials Science, Physics +13
Tungsten Etching in CF 4 and SF 6 Discharges
C.C. Tang, Dennis W. Hess · Journal of The Electrochemical Society · 1984 · 77 citations
Natural Sciences, Materials Science, Physics +17